IEC 62047-34 Ed. 1.0 en – Semiconductor devices – Micro-electromechanical devices – Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.
Product Details
- Edition:
- 1.0
- Published:
- 04/05/2019
- Number of Pages:
- 16
- File Size:
- 1 file , 1.2 MB
- Note:
- This product is unavailable in Ukraine, Russia, Belarus
